Provision of a 300mm Capable High Throughput Electron Beam Lithography System

The University is looking to procure a new 300mm capable high throughput Electron Beam Lithography (EBL) Write Tool for the Southampton Nanofabrication Centre, to be used by researchers, students, and the wider UK academic community to provide state-of-the-art nanometer scale lithography service.

The instrument to be procured will directly replace a JEOL JBX9300FS which suffered a failure in 2021 (the removal of which is an optional requirement of this tender). The user base for the machine is approximately 40 users.

Tenders or requests to participate must be submitted electronically via the University's electronic tendering portal, In Tend, found at the following address: https://in-tendhost.co.uk/universityofsouthampton/aspx/home